The Research of Single Crystal Magnesium Oxide

   The single crystal magnesium oxide(MgO) has excellent chemical stability, thermal conductivity and insulativity at high temperatures. At high frequencies, it has a little dielectric constant and loss. It is a kind of important high-temperature superconducting thin film single crystal substrate which can be industrialized.

   At present, it has less research to the ultra-precision machining technology of single crystal magnesium oxide, and has no intact ultra-precision machining technology which is only propitious to single crystal magnesium oxide. Adopting the method of chemico-mechanical polishing(Chemical Mechanical Polishing, CMP) to process the surface of single crystal magnesium oxide substrate. It can wipe off the subsurface damage layer through the reciprocal action of chemistry and machinery. Therefore, it can efficiently obtain ultra-smooth surface of single crystal magnesium oxide substrate without damage. Based on a lot of GMP experiments, it researches the principal factors which affects the CMP process. The principal factors include polishing pad, polishing solution, polishing pressure, rotation speed, etc. And Meishen researches the influence rules of single crystal magnesium oxide substrate from these factors.

   According to the physicochemical property of single crystal magnesium oxide substrate, it researches and develops chemi-mechanical polishing liquid which is suit for it. For the main property parameters of polishing pad, it tested and evaluated. What’s more, in the same technological parameters, using different polishing pad to test single crystal magnesium oxide substrate respectively, contrasting and analyzing the action mechanism and polishing quality of different polishing pad. And then, choosing a kind of polishing pad which suits for single crystal magnesium oxide substrate. After the orthogonal experiment, it can obtain a better surface quality of substrate through optimizing CMP technological parameters. The Ra(surface roughness) can achieve 1.3(measuring result of AFM). Therefore, it increases the processing efficiency, reduces the cost. In addition, aim to the difficult problem hard to control the substrate with small size during the processing of CMP, it has great guiding significance for improve surface figure accuracy of the substrate.

   Meishen Technology is a professional magnesium oxide manufacturer, which produce magnesium oxide, magnesium carbonate, magnesium sulfate, magnesium hydroxide, gym chalk and others. Welcome to visit and cooperate!